F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-0123 A change was made to

A change was made to the title

SEMI MF1727 — Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers

SEMI MF1811-97 (Reapproved 2002) (first SEMI publication)

The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment

5 µm to 12 µm

F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-0123 A change was made toNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Test Method will determine the quantity of removable moisture and the degree of interaction with trace concentrations of gas phase moisture, of gas distribution systems and components. atmospheric pressure ionization