E09000 - SEMI E90 - 기판 추적 사양 Revision:SEMI E90-0312 - Superseded The specification format in this

The specification format in this Standard provides a comprehensive listing of such properties and available associated test methods (see Appendix 1)

originally published March 2004

SEMI T7-0997E2 (editorial revision)

then defining MPCT performance as a function of IPS performance

SEMI E84-1101 (technical revision)

E09000 - SEMI E90 - 기판 추적 사양 Revision:SEMI E90-0312 - Superseded The specification format in thisGlobal Information & Control Technical Committee , 2011 12 24Audits and Reviews Subcommittee . 1999 , 2011 11 . www. semiviews. org www. semi. org 2012 3 . (substrate ) . (substrates) . (substrate) , (substrate) . (substrate) . . , (substrate) , (substrate) , (batch) (batch) . (substrate) , . Subordinate Document: SEMI E90. 1 0312 Specification for SECS II Protocol Substrate Tracking Referenced SEMI Standards SEMI E5 SEMI Equipment Communications