T01200 - SEMI T12 - Specification for Tracing Jigs and Implements Revision:SEMI T12-0710 - Inactive previously published in 1999

previously published in 1999

order information

include quantitative measures of particle contribution

SEMI E54-0710 (designation update)

AMHS 운송장비(vehicles)와 생산 장비 로드 포트 사이의 캐리어 전송

T01200 - SEMI T12 - Specification for Tracing Jigs and Implements Revision:SEMI T12-0710 - Inactive previously published in 1999This standard was technically approved by the global Traceability Committee and is the direct responsibility of the Japanese Traceability Committee. Current edition approved by the Japanese Regional Standards Committee on November 24, 2004. Initially available at www. semi. org January 2005. Originally published March 2004; previously published July 2004. NOTICE: The designation of SEMI T12 was updated during the 0710 publishing cycle to reflect the