MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current This Specification provides for a

This Specification provides for a smooth transition from existing traceability and labeling procedures to a comprehensive

SEMI MF1366-0308 (technical revision)

本スタンダードは，the Information & Control Global Technical Committeeで技術的に承認されている。現版は2015年2月10日， global Audits and Reviews Subcommitteeにて発行が承認された。2015年6月にwww

1-0698 (Reapproved 0615)

This Standard covers the domain of semiconductor manufacturing equipment operation

MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current This Specification provides for aThis reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of