F04600 - SEMI F46 - Revision:Default Title NOTICE: Paragraphs entitled ‘NOTE:’ are

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline

9995% Quality -- used in the manufacture and processing of semiconductors and advanced electronic devices and circuits

The application of integrated metrology is anticipated to become a key factor for advanced process control in future integrated circuit (IC) manufacturing

It does not include information on the structure of the message

This edition was approved for publication by the global Audits and Reviews Subcommittee on March 26

F04600 - SEMI F46 - Revision:Default Title NOTICE: Paragraphs entitled ‘NOTE:’ areThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been