E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-FPD Substrates Some device manufacturers may not

Some device manufacturers may not require all the GEM capabilities due to differences in their factory automation strategies

This procedure applies to clean filters including those cartridges of metal

displacement of flatband voltage after application of voltage stress at elevated temperatures

The filter housing and filtration element are combined into one sealed and inseparable unit

This Guide incorporates the following methodologies:

E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-FPD Substrates Some device manufacturers may notThe purpose of this Standard is to define a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for the following: Determining the electrical length of RF cable assemblies at the nominal operating frequency in terms of degrees of