S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive SEMI M65-0306 (first published)

SEMI M65-0306 (first published)

SEMI MF1618-1110 (Reapproved 1115)

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard and are not intended to modify or supersede the official Standard

3  Manufacturing processes incorporating bonded wafers typically require thinned wafers

本スタンダードは，Liquid Chemicals Global Technical Committeeで技術的に承認されている。現版は2014年8月25日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年11月にwww

S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive SEMI M65-0306 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee20091216global Audits and Reviews Subcommittee20102www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current