F02000 - SEMI F20 - Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications StdPbc-0213 SEMI D39-0704 (first published)

SEMI D39-0704 (first published)

SEMI G93-0412 (first published)

Elongation

3  Wafer thinning technology becomes popular to meet the demand for thin packages

3 — Standard Mechanical Interface (SMIF)

F02000 - SEMI F20 - Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications StdPbc-0213 SEMI D39-0704 (first published)The purpose of this Specification is to define the metallurgical cleanliness requirements and material composition of 316L stainless steel required for use in the manufacture of components for general purpose, high purity, and ultra high purity chemical (gas or liquid) distribution systems. This Specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as specified in ASTM A276, ASTM A182, JIS G 4303, and JIS G