E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded they are only used for

they are only used for limited types of Mura and are not practical in real varied cases

SEMI T7 — Specification for Back Surface Marking of Double-sided Polished Wafers with a Two-Dimensional Matrix Code Symbol

SEMI C29-0301 (technical revision)

It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices

This standard is intended to set levels of specification for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity

E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded they are only used forThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.