E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link StdPbc-1220 This Standard was technically approved

This Standard was technically approved by the Liquid Chemical Global Technical Committee

front-opening box for interfactory transport (FOBIT) or open cassette inside an IC manufacturing facility

注意：　本文書は、2006年、全面的に書き換えられた。

SEMI E172-0225 (technical revision)

Report contains 10 types of wafer fab materials and 7 types of packaging materials

E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link StdPbc-1220 This Standard was technically approvedNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of the SEMI sensor actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC Link standard. This network communication standard (NCS) taken together with the SEMI SAN Standard suite and the CC Link standard completely and unambiguously defines an open standard