G08400 - SEMI G84 - Specification for Strip Map Protocol StdPbc-0220 This Test Method is therefore
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Description
This Test Method is therefore destructive to the silicon wafer
hermeticity is primarily important to the reliability of MEMS devices
* This Standard has the option to purchase the Current document with a Redline document (Current + Redline)
This guide does not include requirements for individual exhausted enclosures (e
org in January 2016
G08400 - SEMI G84 - Specification for Strip Map Protocol StdPbc-0220 This Test Method is thereforeThe purpose of this specification is to provide definition that will enable the implementation of strip mapping throughout the assembly and test process. This document will enable standardization of the strip map format and execution method throughout the factory floor. This document describes the format and methods in which strip map information shall be formatted and used to transfer information about a strip to and from equipment using the SECS GEM
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