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C00358 - SEMI C3.58 - 八フッ化シクロブタン(C4F8),電子グレード,シリンダ充填,品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI P45-1218 (technical revision)

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SEMI P45-1218 (technical revision)

3D normal luminance uniformity

SEMI C99-0320 (first published)

As this technology has developed

and alignment

C00358 - SEMI C3.58 - 八フッ化シクロブタン(C4F8),電子グレード,シリンダ充填,品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI P45-1218 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20033 (C4F8) (C4F8) Referenced SEMI Standards None.

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