E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML org June 2003

org June 2003

Similar to the World Fab Watch

This Specification has two classifications: General Usage and Auto Transport Usage

The following areas are to be addressed in this Document:

any requirement specified in this Standard shall not negatively impact performances derived from the specifications in SEMI P37

E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML org June 2003This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www. semiviews. org and www. semi. org in June 2016; originally published in 1996; previously published November 2010. This Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer