E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 This Document defines various aspects

This Document defines various aspects of the edges of a flat panel display substrate and describes their relationships

and C from the as-received surface

originally published July 2003

on the other hand

the requirements are presented as a guideline

E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 This Document defines various aspectsThe purpose of this Standard is to ensure minimum necessary level of physical connectivity between the transport module and process modules comprising the cluster tool for 450 mm. It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard. Process modules accept wafers at locations that may vary substantially from one module