F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) 背景および動機付け

背景および動機付け

This Specification covers structure

本法は，ふっ素樹脂製チューブフィッティングに損傷を生じさせるに必要な内部圧力を決定するための標準手順を規定する。

SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services

It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard

F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) 背景および動機付けThis specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www. semi. org December 2002; to be published March 2003. Originally published in 1995. NOTICE: This document was balloted and approved for withdrawal in 2004. The purpose of this