E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object StdTpc-Statistical Control SEMI E88-1102 (technical revision)

SEMI E88-1102 (technical revision)

SEMI P35 — Terminology for Microlithography Metrology

1-0308 (technical revision)

previously published June 2000

SEMI E133-0524 (technical revision)

E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object StdTpc-Statistical Control SEMI E88-1102 (technical revision)The purpose of this Standard is to define the requirements for any factory component computer clock that requires synchronization of time to maintain and manage date time accurately and consistently by using a common time synchronization protocol. This Standard defines the TS Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and