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M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Chemical treatment of the silicon

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Chemical treatment of the silicon surface may be required to produce a reliable Schottky barrier diode

1-1101 (technical revision)

SEMI 3D12-1020 (technical revision)

inspection criteria

more specific standards describing particular FPUs and their services may evolve

M03400 - SEMI M34 - Guide for Specifying SIMOX Wafers StdPbc-1121 Chemical treatment of the silicon

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