E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters StdPbc-0722 1 本方法乃供FPD彩色濾光片供應廠商與使用者之用以評估產品以及開發中項目之品質。 2

1 本方法乃供FPD彩色濾光片供應廠商與使用者之用以評估產品以及開發中項目之品質。 2

34-90 (technical revision)

on-going 200mm and 300mm transitions

This Guide provides reference to other relevant SEMI Standards that ensure quality and reliability of UPW systems

SEMI D57 — Definition of Measurement Index (VCT) for Mura in FPD Image Quality Inspection

E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters StdPbc-0722 1 本方法乃供FPD彩色濾光片供應廠商與使用者之用以評估產品以及開發中項目之品質。 2This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT communication protocol. This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs MFMs. This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems. Referenced SEMI Standards (purchase