E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded JIS G 4303

JIS G 4303

orgで入手可能になり。初版は1994年発行。

This Document provides particle specification for gases

This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle

This Standard is applicable to backlight units

E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded JIS G 4303NOTICE: SEMI E19. 4 and SEMI E19. 5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately. This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www. semiviews. org and www. semi. org in April 2017; originally published in