G06100 - SEMI G61 - Specification for Cofired Ceramic Packages Revision:Default Title SEMI E173-0415E (editorial revision)

SEMI E173-0415E (editorial revision)

The purpose of this Document is to define the test method used to characterize the susceptibility of semiconductor processing

This Test Method can be used for silicon in which the oxygen content is greater than the SIMS instrumental oxygen background as measured in a float zone silicon sample

この文書では，SEMI E78，SEMI E129，SEMI E43とその他の静電気パラメータの測定方法を参照している。これらの文書は，広範囲の条件下での静電気リスクの異なった側面を管理するためのガイダンスを提供する補足的なものである。

SEMI P5-0416 (technical revision)

G06100 - SEMI G61 - Specification for Cofired Ceramic Packages Revision:Default Title SEMI E173-0415E (editorial revision)This specification defines the materials and acceptance criteria for high temperature, cofired ceramic packages. Referenced SEMI Standards SEMI G6 Seal Ring Flatness SEMI G8 Gold Plating Temperature Resistance SEMI G23 Measuring the Inductance of Package Leads SEMI G24 Measuring the Lead to Lead and Loading Capacitance of Package Leads SEMI G25 Measuring the Resistance of Package