S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive parallel interface for carrier transfer

parallel interface for carrier transfer (SEMI E84)

輸送系統及模組／輔助設備（第13節）

注意: 本文書は，2012年，全面的に改訂された。

and Phosphorus-Doped Silicon

originally published February 1999

S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive parallel interface for carrier transferNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides a method for determining cylinders of which types of chemicals should be in separate gas cabinets and which cylinders may be in gas cabinets with each other. This Safety Guideline is intended