E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded This Guide is intended for

This Guide is intended for facilities engineers

These dimensions apply to substrates that are principally used in fabricating AMLCD displays

flat panel display (FPD)画質検査におけるムラの目視検査に近いテスト条件に対する，SEMI D31で導出された方式の適用方法を定義する。

Health and Safety Guideline for Semiconductor Manufacturing Equipment

1  This Guide does not include site-specific conditions

E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded This Guide is intended forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 3100 mm125 mm150 mm200 mm 3100 mm125 mm150 mm 125 mm 200 mm Referenced SEMI Standards (purchase separately) None.