E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded Specification and Guide for Boron

Specification and Guide for Boron Trichloride (BCI3)

This Specification defines the standard for substrates used to fabricate flat panel display masks

SEMI MF84-0307 (technical revision)

SEMI D59-0710 (Reapproved 1224)

org in June 2007

E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded Specification and Guide for BoronNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SEMI2SECS IIJEIDA12 SECS II1SECS I 6 SECS II SECS IIIC SECS IISECS I SECS II SECS II SECS II Referenced SEMI Standards (purchase separately) SEMI E4 Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS I)