HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface StdPbc-712 Joint report from SEMI and

Joint report from SEMI and TechSearch International examining the global semiconductor packaging materials market size and 5-year forecast to 2024

Subordinate Standards:

equipment and material state

本文書の目的は，ガス供給システムに組み込むことを検討しているマスフローコントローラ（MFC）の試験方法を規定し，MFCの指示流量と実流量への周囲温度およびガス温度の影響を定量化することである。

125インチタイプサーフェスマウント型ガス供給システム用1ポートコンポーネントの特性（仕様）と機械的な寸法を規定する。

HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface StdPbc-712 Joint report from SEMI andThe purpose of this Standard is to provide a supplement for the equipment automation interface for communication and control of process, automation and metrology equipment used in HB LED manufacturing. It intends to define the data collection for tracking wafer activity when using a susceptor or a wafer carrier. This Standard serves as a reference for both HB LED manufacturers and equipment suppliers. The document details properties and functions of