G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded associated support equipment and facilities

associated support equipment and facilities infrastructure equipment function within acceptable ranges

orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。

The glass substrate is intended to remain permanently in the package or device

製品やレチクルの保護あるいはEMI制御について

This Specification is a first step to standardize the communication between facility and monitoring components

G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded associated support equipment and facilitiesGlobal Assembly and Packaging CommitteeJapanese Packaging Committee2004723Japanese Regional Standards Committee20049www. semi. org2004111990 Na+NH4+K+Cl NO3 Br SO42 PO43 Referenced SEMI Standards None.