M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded org in March 2010

org in March 2010

SEMI E28-92 (Reapproved 0710)

本仕様にはキャリアIDリーダおよびキャリアIDリーダ／ライタの両方に要求される挙動および通信が含まれる。

This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials

This Guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs)

M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded org in March 2010global Silicon Wafer Committee2008829global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM 450mmAMHS450mm450mm 450mm 5 SISystem International Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF533 Test Method for Thickness and Thickness Variation of Silicon Wafers SEMI MF928 Test