P03100 - SEMI P31 - 化学増幅型（CA）フォトレジストパラメータのカタログ発行の作業方法 Revision:SEMI P31-0304 - Superseded regulators

regulators

This Document defines two types of interfaces: Type 1) RI-TRP-DR2B HDX MPT and Type 2) ISO/IEC 18000-2 Type B (HDX)

Curriculum Objectives

SEMI D19-0299 (first published)

The purpose of this Standard is to provide a common format for memory fail datalog specification along with necessary synchronization information enabling an efficient dataflow for volume diagnostics applications for memories

P03100 - SEMI P31 - 化学増幅型（CA）フォトレジストパラメータのカタログ発行の作業方法 Revision:SEMI P31-0304 - Superseded regulatorsGlobal Micropatterning CommitteeJapanese Micropatterning Committee200419Japanese Regional Standards Committee20042www. semi. org2004319979 CA chemical amplified Referenced SEMI Standards None.