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G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded 1 — Provisional Specification for
G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded 1 — Provisional Specification for
$115.50
Description
1 — Provisional Specification for SECS-II Protocol Substrate Tracking
and improving the use or efficiency of utilities
SEMI D63-0818 (Reapproved 0224)
provide a map between EFEM functional elements and existing standards
SEMI G18-86 (technical revision)
G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded 1 — Provisional Specification forAssembly & Packaging Global Technical Committee2013822global Audits and Reviews Subcommittee201311www. semiviews. org www. semi. org20124 450mm PGVAGVOHT450mm 450mm450mm(TFC) 1325 3 6 Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer
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