E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdPbc-0713 12-86 (technical revision)

12-86 (technical revision)

this document defines terms and metrics needed for quantifying the waviness of CSW

Further information regarding UPW systems can be found in SEMI F61

SEMI MF1724 — Test Method for Measuring Surface Metal Contamination of Polycrystalline Silicon by Acid Extraction-Atomic Absorption Spectroscopy

This Specification is intended to ensure a high-degree of device interoperability on the sensor/actuator network

E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdPbc-0713 12-86 (technical revision)In order to more efficiently facilitate the integration of process control systems (PCS) such as run to run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including