E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard Revision:SEMI E20-0697 (Reapproved 1102) - Superseded SEMI E47-0301 (Reapproved 0512)

SEMI E47-0301 (Reapproved 0512)

it has been shown that various metal-dielectric interactions may cause potential shifts that affect the effective work function

This Test Method describes standard procedures for metal oxide semiconductor (MOS) capacitor fabrication

resulting in materials that are generically called solar grade silicon (sog-Si) in the present Document

orgで入手可能となる。初版は2011年6月発行，前版は2012年9月発行。

E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard Revision:SEMI E20-0697 (Reapproved 1102) - Superseded SEMI E47-0301 (Reapproved 0512)This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www. semi. org in October 2010. Originally published in 1991; previously published November 2002. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of the standard is to specify the Emergency Off