E06800 - SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers StdPbc-0710 but to align with and

but to align with and cite the usage of existing standards

Although these features are intended for specific functions of AGV

SEMI D9-0303 (Reapproved 0321)

metallic contribution

本仕様は，3インチ，100 mm，125 mm，150 mmウェーハを加工処理する際に使用するプラスチックおよびメタルウェーハキャリアの寸法上の要求事項を示す。また，200 mm ウェーハキャリアについて，仕様ではないが，関連情報を含む。

E06800 - SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers StdPbc-0710 but to align with andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this method is to provide a standardized method for quantifying the warm up time of a mass flow controller (MFC). The test conditions in this method are intended to simulate bench top warm up, with an MFC