Apex 1513 AE Advanced Energy RF Generator 1.5kW @ 13.56MHz Untested As-Is Part No: PH266-01

Part No: PH266-01

Removed from a Karl Suss MJB 55 Wafer Mask Aligner System This Karl Suss 455-60-26 PCB Card is used working surplus

Inventory # AA-593

Inventory # K-7372

Daughterboard Part No: 03-20-00778

Apex 1513 AE Advanced Energy RF Generator 1.5kW @ 13.56MHz Untested As-Is Part No: PH266-01Apex 1513 AE Advanced Energy RF Generator 1. 5kW @ 13. 56MHz Untested As Is Model No: RF APEX 1513 Input: 3, 208VAC, 50 60Hz Output: 1. 5kW @ 13. 56MHz CE Marked Untested As Is This item is untested surplus and is being sold as is. The physical condition is fair, but there are signs of previous use and handling. The unit appears to have been dropped and has bent handles and a dent to the faceplate. There is not part number serial number tag on the