D05900 - SEMI D59 - Terminology for 3D Display Revision:SEMI D59-0519 - Superseded SEMI E143-0306 (Reapproved 0512)

SEMI E143-0306 (Reapproved 0512)

orgで入手可能となる。初版は1989年発行，前版は2003年1１月発行。

This places a burden on the capabilities of transport modules to move wafers to and from various process modules in a cluster tool

1 (applicable for systems designed to handle 300 mm wafer carriers)

1-0921 (technical revision)

D05900 - SEMI D59 - Terminology for 3D Display Revision:SEMI D59-0519 - Superseded SEMI E143-0306 (Reapproved 0512)1 Purpose 1. 1 This Standard is written to provide better communication between parties in the supply chain, as well as between resale and consumers. 2 Scope 2. 1 This Standard starts with the basic and most necessary terms which are used in 3D display (especially for those different from 2D displays). Establishment of other related terminologies will follow. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D59 0710