E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Specification describes the volume

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

and applied voltage together with the breakdown voltage of a mercury silicon contact

This Test Method is especially applicable for silicon where boron is an unintentional p-type contaminant at trace levels (<5 × 1014 atoms/cm3)

to be published February 1999

By this Standard

E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Specification describes the volumeglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.