E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C This Document will specify methods

This Document will specify methods

目的 ―　本仕様は，ベース，ウィンドウ・フレーム，キャップおよび封止ガラス材料を含んだCerquadパッケージ部品用の受諾規準を定義するものである。

maintenance technicians and engineers

本仕様では，ハードコート極紫外線（EUV）マスクにマークする記号法について記載する。

• Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)

E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) volume-C This Document will specify methodsNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing