E15800 - SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア（450FOUP）とキネマティックカプリングの機械仕様 StdTpc-XML SEMI S10 — Safety Guideline

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met

SEMI M40-0200 (first published)

5  The purpose of this technical guide is to make the best practice recommendations regarding materials used in the construction of internal feeders

The intention is to provide for flexibility and expansion of the technology

E15800 - SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア（450FOUP）とキネマティックカプリングの機械仕様 StdTpc-XML SEMI S10 — Safety GuidelineSEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20143www. semiviews. org www. semi. org2010720129 SEMI M74450 mm 450 mm 450 mm 450 mmKCP 3 Referenced SEMI Standards SEMI E144 Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment SEMI M74 Specification for 450 mm Diameter Mechanical Handling Polished