P00600 - SEMI P6 - Specification for Registration Marks for Photomasks Revision:SEMI P6-88 (Reapproved 0707) - Inactive While this Document makes frequent

While this Document makes frequent reference to electrostatic fields and effects

It is expected that applications will be written to organize and present this information to human users in a form that is easier for end users to digest

This test method is intended to be used with FT-IR spectrometers that are equipped to operate in the region including the wave number range from 700 to 500 cm-1

7-0304E (editorial revision)

The VLSI grade purity level is typically required by semiconductor devices with geometries of 0

P00600 - SEMI P6 - Specification for Registration Marks for Photomasks Revision:SEMI P6-88 (Reapproved 0707) - Inactive While this Document makes frequentThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1988. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available