F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

and qualification methods for liquid chemical blending equipment

SEMI E109-1110 (designation update)

buffer oxide etchants

3 — Guide for Ultrahigh Purity Deionized Water and Chemical Distribution Systems in Semiconductor Manufacturing Equipment

F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems Revision:SEMI F31-0313 - Superseded This edition was approved forNOTICE: This Standard was completely rewritten in 2024. 1 Purpose 1. 1 This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS. 2 Scope 2. 1 This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes. Referenced Standards and Documents (purchase separately) SEMI F39 Guide for