E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation StdPbc-0220 SEMI E143-0306 (Reapproved 0512)

SEMI E143-0306 (Reapproved 0512)

This Document specifies how Sensor/Actuator/Controller devices interoperate on the network specific for the MOTIONNET Public specification referenced in the § 4

This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network

In general

org in October 2007

E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation StdPbc-0220 SEMI E143-0306 (Reapproved 0512)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and