HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current This Document is a guide

This Document is a guide to a test method to determine gas change/purge efficiency of gas delivery system

SEMI M56-1018 (technical revision)

facility distribution

org in November 2004

Similar requirements and options covering load ports for wafers are covered in SEMI E15 (for 200 mm wafers and smaller) and in SEMI E15

HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current This Document is a guideThis Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in June 2015. Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices, in particular high brightness light emitting diodes (HB LED). In SEMI HB1 a multitude of