E05412 - SEMI E54.12 - CC-LINK のためのセンサ／アクチュエータ・ネットワーク通信に関する仕様 Revision:SEMI E54.12-0701E (Reapproved 1211) - Superseded Available at www

Available at www

• Description of the capabilities expected in each FG (required and optional)

34-89 (first published)

SEMI D31-0213 (technical revision)

SEMI E169-0615 (technical revision)

E05412 - SEMI E54.12 - CC-LINK のためのセンサ／アクチュエータ・ネットワーク通信に関する仕様 Revision:SEMI E54.12-0701E (Reapproved 1211) - Superseded Available at wwwglobal Information & Control Technical Committee2011912global Audits and Reviews Subcommittee201112www. semiviews. org www. semi. org20015200611 SEMI E54 : SEMISANCC LinkNCSSEMI SANCC Link CC LinkCC Link Referenced SEMI Standards SEMI E39 Object Services Standard: Concepts, Behavior and Services SEMI E54. 1 Sensor Actuator Network Common Device Model SEMI E54. 3 Specification for Sensor Actuator Network Specific Device Model for Mass Flow Device SEMI