E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles StdTpc-Automation Technology Where material contains other material

Where material contains other material (such as carriers containing wafers)

Flat Panel Display Global Technical Committeeで技術的に承認されたもので，Japanese FPD Materials and Components Committeeが直接責任を負うものである。現版は，2003年4月28日Japanese Regional Standards Committeeにて承認されている。2003年6月にまずwww

SEMI D21 — Definitions for Flat Panel Display Masks

SEMI E82-1101 (technical revision)

originally published in 1982

E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles StdTpc-Automation Technology Where material contains other materialThis Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle, used to ship, transport and store a 6 inch reticle. The EUV Pod consists of an outer pod and a protective inner pod. The EUV Pod is to be used when a conventional reticle carrier does not meet the requirements of EUVL. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and