E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - Inactive • Carrier scheduling

• Carrier scheduling

SEMI E77-1104 (Reapproved 0710)

This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM)

org in February 2009

Format: Online data access compatible with IOS

E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - Inactive • Carrier schedulingNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related