E05200 - SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers StdPbc-0513 SEMI T5 — Specification for

SEMI T5 — Specification for Alphanumeric Marking of Round Gallium Arsenide Wafers

heavily doped n-type silicon substrates using secondary ion mass spectrometry (SIMS)

1，SEMI M6

SEMI E87-0324 (technical revision)

Subordinate Standards (included):

E05200 - SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers StdPbc-0513 SEMI T5 — Specification forThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at www. semiviews. org and www. semi. org in July 2014; originally published in 1995; previously published December 2013. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI AUX030. To provide a