MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 the customer may want to

the customer may want to reference SEMI M1

Indirect Contrast Measurement — This method requires three polarizers that have similar C

Alternative methods may be used as long as they comply with SEMI C1 guidelines for method validation

3  Specific requirements for density of selected surface defects (Table 2) and variations of layer thickness and layer net carrier density are included together with AQLs for these properties

This Practice can also be used to compare the relative costs of a single instrument under different operating conditions

MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 the customer may want toThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to