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Microbeam analysis. Methods of specimen preparation for analysis of general powders using WDS and EDS Ingestion-build-64721 4) Tilt and turn andWhat is this standard about? This document specifies specimen preparation methods for the analysis of particles in powders using energy dispersive spectrometers (EDS) or wavelength dispersive spectrometers (WDS) installed on an EPMA or SEM. The preparation methods for powder particle analysis are classified by the analytical purpose and the particle size. This document applies to inorganic particles larger than 100 nm and smaller than 100 m in