Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE weekly and regular control

weekly and regular control

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13 Safety in use

Electromagnetic compatibility (EMC) - Part 6-1: Generic standards – Immunity for residential

Correction of the language used to describe requirements for interpretation of results during a verification dose experiment in the second paragraph in 7

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE weekly and regular controlWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.