0.04" Thick Graphite Substrate for RTP Furnace's Sample Holder, 3" or 5" O.D Selectable - EQ-G-Holder Outside Diameter:3" O.D. TTV/Bow/Warp: <=35um

TTV/Bow/Warp: <=35um

Dimension:  76mm x 25 mm x 1

Resistivities:  0

Polished surface: one side polished

current are included and switchable on the device

0.04" Thick Graphite Substrate for RTP Furnace's Sample Holder, 3" or 5" O.D Selectable - EQ-G-Holder Outside Diameter:3" O.D. TTV/Bow/Warp: <=35umSuch unpolished Graphite Substrate can be placed in the center of holder for holding test samples up to 3 or 5'' diam. The excellent temperature uniformity can be achieved in this 3' or 5'' diam. area due to the benefit from its high thermal conductivity. Graphite Substrates Properties Item No. G Holder Density (g cm3) 1. 82 Particle Size (cm) 0. 00102 Thermal Conductivity (W m. K) >83 Thermal Expansion (x10 6 oC) <6 Dielectric Constant (at 1MHZ) 12